Roughness characteristic length scales of micro-machined surfaces: A multi-scale modelling

Effect of roughness on Radiation Characteristic of Reflector Antenna Based on Multi-scale Modelling

Firstly, the wavelet analysis was used as the filter tool to separate the different scale roughness from the reflector surface testing data, and a mathematical model of the multi-scale roughness was presented to investigate its impact on the radiation characteristic of the reflector antenna. Based on the roughness model, a formulation of density of the far-field was deduced and the definable mo...

Prediction of Machined surface Roughness A Review

Recent advances in manufacturing technology and industrial automation require efficient and quality oriented machining practices. Performance, cost effectiveness and reliability of the work piece depends on the quality of surface roughness and can be measured with contact (conventional) and non contact (advanced) methods. Various measurement techniques starting from stylus to machine vision are...

Oxidation smoothening of silicon machined micro- and nano-scale structures

Effect of Length-scale Parameter on Pull-in Voltage and Natural Frequency of a Micro-plate

This paper deals with the effect of the intrinsic material length-scale parameter on the stability and natural frequency of a rectangular micro-plate for two different cases; fully clamped and fully simply supported. A variational formulation based on Hamilton’s principle and the modified couple stress theory is used to obtain the nonlinear governing equation of a micro-plate incorporating the ...

Large-Scale Polysilicon Surface Micro-Machined Spatial Light Modulator

A large-scale, high speed, high resolution, phase-only microelectromechanical system (MEMS) spatial light modulator (SLM) has been fabricated. Using polysilicon thin film technology, the micro mirror array offers significant improvement in SLM speed in comparison to alternative modulator technologies. Pixel opto-electromechanical characterization has been quantified experimentally on large scal...